Data from "Development of a Deep Potential Model for F and CF2 Etching of Si and SiO2"

DataSpace 2026 Dataset Open access

Read full text
Authors: Andreas Kounis-Melas, Athanassios Panagiotopoulos, David Barry Graves
DOI: 10.34770/f70j-yy93
Cited by: 1

Publication details

Journal / source
DataSpace
Publication date
1 January 2026
Document type
Dataset