A novel multi-spatial-frequency ultra-precision and efficiency-enhanced manufacturing paradigm based on immersion depth and scanning speed dynamic co-variation model
Fields of Study & Subjects
Advanced Measurement and Metrology Techniques
Advanced Surface Polishing Techniques
Piezoelectric Actuators and Control
Publication details
- Journal / source
- Light Advanced Manufacturing
- Volume
- 7
- Issue
- 0
- Pages
- 1–1
- Publication date
- 1 January 2026