扫频干涉多表面超分辨测量及实验验证

Acta Optica Sinica 2026

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Authors: 黄泽安 Huang Zean, 黄明杰 Huang Mingjie, 刘奕昌 Liu Yichang, 董博 Dong Bo, Yulei Bai
DOI: 10.3788/aos251330
Cited by: 0
References: 21

Fields of Study & Subjects

Optical measurement and interference techniques Surface Roughness and Optical Measurements Advanced Measurement and Metrology Techniques

Publication details

Journal / source
Acta Optica Sinica
Volume
46
Issue
4
Pages
0412002–0412002
Publication date
1 January 2026
Language
EN