高深宽比高陡直度TiO2超构表面的分步ICP快速成型方法（特邀）

Acta Optica Sinica 2026

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Authors: 陈琦凯 Chen Qikai, 吕启瑞 Lü Qirui, 姜钧怀 Jiang Junhuai, 高宇斌 Gao Yubin, 占涵涛 Zhan Hantao, 鲁铖涛 Lu Chengtao, 王铸宁 Wang Zhuning, 马耀光 Ma Yaoguang

DOI: 10.3788/aos251559

Cited by: 0

References: 24

Fields of Study & Subjects

Optical Coatings and Gratings Metamaterials and Metasurfaces Applications Nanofabrication and Lithography Techniques

References 24