基于纳米计量测试与反馈的电子束光刻拼接误差预补偿方法（特邀）

Acta Optica Sinica 2026

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Authors: 刘亮 Liu Liang, 解钰莹 Xie Yuying, 冯超 Feng Chao, 董思禹 Dong Siyu, 朱静远 Zhu Jingyuan, 魏泽勇 Wei Zeyong, 王占山 Wang Zhanshan, 程鑫彬 Cheng Xinbin

DOI: 10.3788/aos251742

Cited by: 0

References: 25

Fields of Study & Subjects

Advancements in Photolithography Techniques Advanced Measurement and Metrology Techniques Optical measurement and interference techniques

References 25