飞秒激光辅助化学刻蚀微纳结构及其应用（特邀）
Fields of Study & Subjects
Laser Material Processing Techniques
Laser-Matter Interactions and Applications
Nanofabrication and Lithography Techniques
Publication details
- Journal / source
- Acta Optica Sinica
- Volume
- 46
- Issue
- 3
- Pages
- 0323006–0323006
- Publication date
- 1 January 2026
- Language
- EN