基于阶梯降温退火的氧化铪薄膜激光损伤阈值提升及机理分析(特邀)
Fields of Study & Subjects
Optical Coatings and Gratings
Semiconductor materials and devices
Laser Material Processing Techniques
Publication details
- Journal / source
- Acta Optica Sinica (Online)
- Volume
- 3
- Issue
- 3
- Pages
- 0301001–0301001
- Publication date
- 1 January 2026
- Language
- EN