超快激光隐形切割的应力分析与复杂晶圆结构的高效切割工艺研究

Chinese Journal of Lasers 2026

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Authors: 赵子涵 Zhao Zihan, 周欣宇 Zhou Xinyu, 杜晨鹏 Du Chenpeng, 朱圣云 Zhu Shengyun, 栗岩锋 Li Yanfeng, 刘庆京 Liu Qingjing, 张林 Zhang Lin, 胡明列 Hu Minglie
DOI: 10.3788/cjl250651
Cited by: 1
References: 16

Fields of Study & Subjects

Military Technology and Strategies Legal and Regulatory Analysis Linguistic Cultural and Literary Studies

Publication details

Journal / source
Chinese Journal of Lasers
Publisher
Shanghai Institute of Optics and Fine Mechanics
Volume
53
Issue
8
Pages
0802506–0802506
Publication date
1 January 2026
Language
EN