单晶硅光学元件缺陷检测技术研究进展综述(特邀)

Infrared and Laser Engineering 2026

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Authors: 陈浩 CHEN Hao, 彭星 PENG Xing, 石峰 Shi Feng, 宋辞 Song Ci, 田野 Tian Ye, 陈坚 CHEN Jian, 周海峰 Zhou Haifeng, 俞伟洋 YU Weiyang
DOI: 10.3788/irla20250420
Cited by: 0
References: 93

Fields of Study & Subjects

Industrial Vision Systems and Defect Detection Optical measurement and interference techniques Surface Roughness and Optical Measurements

Publication details

Journal / source
Infrared and Laser Engineering
Volume
55
Issue
1
Pages
20250420–20250420
Publication date
1 January 2026
Language
EN