光谱共焦厚度测量中抖动效应的影响
Fields of Study & Subjects
Optical measurement and interference techniques
Surface Roughness and Optical Measurements
Digital Holography and Microscopy
Publication details
- Journal / source
- Laser & Optoelectronics Progress
- Volume
- 63
- Issue
- 1
- Pages
- 0112006–0112006
- Publication date
- 1 January 2026
- Language
- EN