光谱共焦厚度测量中抖动效应的影响

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Authors: 李春艳 LI Chunyan, 付雯雯 FU Wenwen, 刘继红 LIU Jihong, 李丹琳 Li Danlin, 武少杰 WU Shaojie, 王泞淋 WANG Ninglin, 任凯利 Ren Kaili
Cited by: 0
References: 15

Fields of Study & Subjects

Optical measurement and interference techniques Surface Roughness and Optical Measurements Digital Holography and Microscopy

Publication details

Journal / source
Laser & Optoelectronics Progress
Volume
63
Issue
1
Pages
0112006–0112006
Publication date
1 January 2026
Language
EN