Data accompanying the publication: Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure

Authors (publication): Anubhav Paul, Jila Rafighdoost, Xiujie Dou, Silvania F. Pereira This dataset contains the MATLAB scripts and supporting data used to reproduce the main simulation, calibration, sensitivity, and validation results in the publication “Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure”. It includes simulated normalized far-field cross-sections (ky = 0 plane) for cliff-like nanostructures under TE/TM illumination for multiple side-wall angles and heights, the corresponding calibration-curve data (based on the “visibility” metric), and sensitivity-analysis datasets (e.g., edge roundness and structure position). The dataset also provides experimental/simulated profile comparisons and AFM-derived statistics used for experimental verification.