Data accompanying the publication: "Aberration characterisation in coherent Fourier scatterometry"

4TU.ResearchData 2026 Dataset Open access

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Authors: Sarika Soman
DOI: 10.4121/0d59f708-bac0-47f4-b0c4-97e15548e725
Cited by: 0

Abstract

Authors (publication) - Sarika Soman, Silvania F. Pereira The dataset includes the 2D scan data underlying the findings in the publication - "Aberration characterisation in coherent Fourier scatterometry". The dataset shows a 2D CFS scan data of an etched pit in a Si wafer when different amounts of Zernike mode aberration is applied to the input beam using an SLM. The aberrations used in the study are - defocus, astigmatism, oblique astigmatism, horizontal coma, vertical coma, spherical, oblique trefoil, vertical trefoil.

Fields of Study & Subjects

Optical measurement and interference techniques Surface Roughness and Optical Measurements Optical Polarization and Ellipsometry

Publication details

Journal / source
4TU.ResearchData
Publication date
13 January 2026
Language
EN
Document type
Dataset