Data supporting the publication: The 2D approximation quickly breaks down in reflection ptychography
Abstract
This dataset accompanies the publication "The 2D approximation quickly breaks down in reflection ptychography". For more details, see the publication. The data was generated using the ptychography simulation and reconstruction package Ptyrax (https://github.com/ssenhorst/ptyrax). It aims to simulate the data generated in an EUV reflection Ptychography setup, in the case that the sample is a simple weakly scattering object, whose reflected field can be modeled as an identical lateral pattern reflected at two distinct depth levels separated by a distance t. Simulations were performed for multiple thicknesses t. More infoSee README.MD for more information on the file formats and contents.
Publication details
- Journal / source
- 4TU.ResearchData
- Publication date
- 2 June 2026
- Language
- EN
- Document type
- Dataset