Design and Fabrication of a High-Temperature Stable, Low-Power Microheater for Semiconductor Gas Sensors

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Authors: Jun-Hyeok Lee, Tae-Won Ha, Chil-Hyoung Lee, Dong-Weon Lee
Cited by: 1
References: 32

Fields of Study & Subjects

Gas Sensing Nanomaterials and Sensors Electrical and Thermal Properties of Materials Transition Metal Oxide Nanomaterials

Publication details

Journal / source
Journal of Sensor Science and Technology
Publisher
The Korean Sensors Society
Volume
35
Issue
1
Pages
22–29
Publication date
31 January 2026
Language
EN