Virtual Fabrication for Semiconductor Sensor Development: Process Modeling and Design Optimization
Fields of Study & Subjects
Advanced MEMS and NEMS Technologies
Advancements in Semiconductor Devices and Circuit Design
Manufacturing Process and Optimization
Publication details
- Journal / source
- Journal of Sensor Science and Technology
- Volume
- 35
- Issue
- 1
- Pages
- 53–66
- Publication date
- 31 January 2026
- Language
- EN