THERMOMECHANICAL EFFECTS WHEN ATOMIC CLUSTER FALLS ONTO COATING SURFACE

The model of nonlocal thermoelastic peak (NTP) of the ion is generalized for the case of multi-atomic cluster bombarding the surface of solid body. The condition for the occurrence of the subsurface NTP is formulated, and its geometric dimensions, volume, and thermal energy density are determined depending on energy and the number of atoms in the cluster. The analysis of processes of droplet sputtering of solids during irradiation with atomic clusters is carried out based on the thermodynamic approach. The condition for droplet sputtering in the case of bombardment of solid with clusters is formulated.