Molecular Beam Epitaxy of Al$\mathrm{_{1-x}}$Sc$\mathrm{_{x}}$N Nanowires: Towards Group-III Nitride Piezoelectric Nanogenerators with Enhanced Response
Abstract
We study the molecular beam epitaxy of self-assembled Al$\mathrm{_{1-x}}$Sc$\mathrm{_{x}}$N nanowires on conductive TiN layers and demonstrate their application in piezoelectric nanogenerators. Wurtzite Al$\mathrm{_{1-x}}$Sc$\mathrm{_{x}}$N nanowires with uniform Sc incorporation are grown across a wide composition range (0
Fields of Study & Subjects
GaN-based semiconductor devices and materials
Acoustic Wave Resonator Technologies
Nanowire Synthesis and Applications
Publication details
- Journal / source
- arXiv (Cornell University)
- Publication date
- 13 February 2026
- Language
- EN
- Document type
- Preprint