A1.3 - Investigation of SiNW Structures Response to Ammonia at Different Humidity Conditions

We demonstrated the silicon nanowires structure sensing response by measuring the change in electrical conductance upon NH 3 gas exposure.Measurements were taken for SiNW and TiO 2 decorated SiNW samples at very low concentrations of ammonia gas starting from 1 ppm up to 11.8 ppm in dry and humidity atmosphere.Results showed an increase in sensitivity and lower response time to ammonia gas in presence of 50 % humidity.