A1.4 - Stoneley Waves Propagation Through rot. YX-LiNbO3/SU-8/Si Structures

Interface acoustic waves (IAWs), also known as Stoneley waves, are theoretically and experimentally investigated in a multilayer platform consisting of Y-rotated, X-propagating LiNbO₃, an SU-8 guiding layer, and a silicon substrate.Two distinct IAW modes with different phase velocities are identified for specific Y-rotated cuts of the LiNbO₃ half-space.These modes propagate faster than conventional surface acoustic waves and slower than leaky surface acoustic waves on bare LiNbO₃.Numerical simulations and experimental measurements confirm the efficient electroacoustic excitation of the Stoneley modes.