MD animations (Supplement materials)

Zenodo (CERN European Organization for Nuclear Research) 2026 Dataset Open access

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Authors: Nesterenko, Iurii
DOI: 10.5281/zenodo.17913335
Cited by: 0

Abstract

Supplement materials for the submission Atomic layer etching of sputter-deposited AlNthin films in radiofrequency Cl2-Ar plasmas

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
1 January 2026
Document type
Dataset