Atomistic Insights into EUV Photoresist Photolysis via Full Temporal Dynamics

Zenodo (CERN European Organization for Nuclear Research) 2026 Dataset Open access

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Authors: Y. J. Li
DOI: 10.5281/zenodo.18027809
Cited by: 0

Abstract

PWmat input files corresponding to article “Atomistic Insights into EUV Photoresist Photolysis via Full Temporal Dynamics”

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
30 March 2026
Document type
Dataset