Copper Damascene Process-Based High-Performance Thin-Film Lithium Tantalate Modulators

Zenodo (CERN European Organization for Nuclear Research) 2026 Dataset Open access

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Authors: Mengxin Lin, Tobias J. Kippenberg
DOI: 10.5281/zenodo.18148020
Cited by: 0

Abstract

Data and code used to produce the figures in "Copper Damascene Process-Based High-Performance Thin-Film Lithium Tantalate Modulators".

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
16 February 2026
Document type
Dataset