Statistical comparative analysis of microwave and conventionally annealed sol–gel derived metal oxide thin films

All experimental data used to generate the figures and statistical analyses in this study are provided in both Excel and comma-separated values (CSV) formats. The datasets include numerical values corresponding to structural, morphological, optical, dielectric, and electrical characterizations of sol–gel derived TiO₂ and NiTiO₃ thin films subjected to conventional and microwave annealing. The master Excel file (Figure_Data_All.xlsx) contains five separate worksheets. The Crystallite_Size sheet includes mean crystallite size values and standard deviations extracted from X-ray diffraction analysis for different annealing conditions. The Surface_Roughness sheet provides average surface roughness values obtained from atomic force microscopy measurements. The Optical_Bandgap sheet contains optical band gap values estimated from Tauc plots derived from UV–Vis absorption data. The Dielectric_Constant sheet includes frequency-dependent dielectric constant values measured using capacitance–voltage analysis. The Leakage_Current sheet reports leakage current density values as a function of applied electric field obtained from current–voltage measurements. Corresponding CSV files are provided for each figure to enable independent verification, replotting, and reuse of the data