Autonomous Sampling and SHAP Interpretation of Deposition-Rates in Bipolar HiPIMS
Abstract
Preprint for "Autonomous Sampling and SHAP Interpretation of Deposition-Rates in Bipolar HiPIMS" Alexander Wieczorek1,+, Nathan Rodkey1,+,*, Jan Sommerhäuser1, Jason Hattrick-Simpers2,3, Sebastian Siol1,* 1Laboratory for Surface Science and Coating Technologies, Empa–Swiss Federal Laboratories for Materials Science and Technology, Ueberlandstrasse 129, Duebendorf CH-8600, Switzerland. 2Department of Materials Science and Engineering, University of Toronto, M5S 3E4, Toronto, ON, Canada. 3Acceleration Consortium, University of Toronto, M7A 2S4, Toronto, ON, Canada. + These authors contributed equally * Corresponding authors: nathan.rodkey@empa.ch, sebastian.siol@empa.ch Keywords: HiPIMS, bipolar pulsing, SHAP, Autonomous, Bayesian Optimization
Fields of Study & Subjects
Metal and Thin Film Mechanics
Machine Learning in Materials Science
Advanced Electron Microscopy Techniques and Applications
Publication details
- Journal / source
- Zenodo (CERN European Organization for Nuclear Research)
- Publication date
- 9 January 2026
- Document type
- Preprint