Design, fabrication, and characterization of electrostatic comb-drive actuators for nanoelectromechanical silicon photonics

Zenodo (CERN European Organization for Nuclear Research) 2026 Preprint Open access

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Authors: Babak Vosoughi Lahijani
DOI: 10.5281/zenodo.18244670
Cited by: 0

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Photonic and Optical Devices Mechanical and Optical Resonators

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
14 January 2026
Document type
Preprint