ВЛИЯНИЕ ТЕРМООТЖИГА НА СОСТОЯНИЕ ИОННО-ИМПЛАНТИРОВАНННЫХ АТОМОВ MN В SI"

Zenodo (CERN European Organization for Nuclear Research) 2026 Dataset Open access

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Authors: Л.Э.Хасанова2 Б.Э.Эгамбердиев1
DOI: 10.5281/zenodo.18287684
Cited by: 0

Fields of Study & Subjects

Semiconductor materials and interfaces Ion-surface interactions and analysis Semiconductor materials and devices

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
18 January 2026
Document type
Dataset