Detection of MEMS Acoustics via Scanning Tunneling Microscopy

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Authors: R. J. G. Elbertse, Minxing Xu, Ata Keşkekler, Alexander F. Otte, Richard A. Norte
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Abstract

This is the OpenData Folder for the paper under the same name.

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Force Microscopy Techniques and Applications

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
20 January 2026
Language
EN
Document type
Dataset