Detection of MEMS Acoustics via Scanning Tunneling Microscopy
Abstract
This is the OpenData Folder for the paper under the same name.
Fields of Study & Subjects
Advanced MEMS and NEMS Technologies
Acoustic Wave Resonator Technologies
Force Microscopy Techniques and Applications
Publication details
- Journal / source
- Zenodo (CERN European Organization for Nuclear Research)
- Publication date
- 20 January 2026
- Language
- EN
- Document type
- Dataset