A GAME-CHANGING EQUATION DURING THE ETCHING OF TUNING FORKS AND ITS VERIFICATION THROUGH EXPERIMENTS

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Authors: Kadir Can Erbaş, Mebrure Erdoğan, Dilek Çökeli̇ler Serdaroğlu, İsmail Cengiz KOÇUM
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Abstract

This record contains the accepted author manuscript (AAM) of the paper: "A Game-Changing Equation During the Etching of Tuning Forks and Its Verification Through Experiments", Measurement (2024). DOI: https://doi.org/10.1016/j.measurement.2024.115135 The paper presents a new analytical formulation describing frequency variations in tuning fork resonators during the etching process. The proposed model is validated through controlled experiments and compared with existing theoretical approaches. The results demonstrate high accuracy in predicting etching-induced frequency shifts and provide practical guidelines for tuning fork–based mass sensing applications. This version is provided for open-access dissemination in accordance with the publisher’s self-archiving policy.

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
6 February 2026
Document type
Preprint