A GAME-CHANGING EQUATION DURING THE ETCHING OF TUNING FORKS AND ITS VERIFICATION THROUGH EXPERIMENTS
Abstract
This record contains the accepted author manuscript (AAM) of the paper: "A Game-Changing Equation During the Etching of Tuning Forks and Its Verification Through Experiments", Measurement (2024). DOI: https://doi.org/10.1016/j.measurement.2024.115135 The paper presents a new analytical formulation describing frequency variations in tuning fork resonators during the etching process. The proposed model is validated through controlled experiments and compared with existing theoretical approaches. The results demonstrate high accuracy in predicting etching-induced frequency shifts and provide practical guidelines for tuning fork–based mass sensing applications. This version is provided for open-access dissemination in accordance with the publisher’s self-archiving policy.
Fields of Study & Subjects
Acoustic Wave Resonator Technologies
Advanced MEMS and NEMS Technologies
Mechanical and Optical Resonators
Publication details
- Journal / source
- Zenodo (CERN European Organization for Nuclear Research)
- Publication date
- 6 February 2026
- Document type
- Preprint