DATA for "Impact of high-temperature annealing on propagation loss in LPCVD Si3N4 thin films and waveguides in the visible"

Zenodo (CERN European Organization for Nuclear Research) 2026 Dataset Open access

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Authors: Nicolas Volet, Emil Zanchetta Ulsig, Kevin Bach Gravesen, Peter L. Tønning, Eric J. Stanton, Asger Brimnes Gardner, Jacob Christian Loft
DOI: 10.5281/zenodo.18664094
Cited by: 1

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
16 February 2026
Document type
Dataset