Dataset for manuscript titled "Plasma characterization for reactive HiPIMS process regulation of vanadium oxides"
Abstract
Original dataset for figures in both the manuscript and the supplementary files. Fig.S7-QO2 increase and Fig. S7-QO2 decrease has errors in data. Since it was found out late after the publication, the correct data is now uploaded at: https://zenodo.org/records/20558035.
Publication details
- Journal / source
- Zenodo (CERN European Organization for Nuclear Research)
- Publication date
- 17 February 2026
- Document type
- Dataset