f-shrink-euv: v1.0 f-Shrink: First Stable Release for EUV Control Benchmark
Abstract
· Complete High-NA (0.55) EUV stochastic model with photon shot noise, chemical noise, mask 3D effects · Four controller variants: PID, Fast, Decay (β=0.02,0.035), Smooth (α=0.05,0.1,0.15) · Benchmark results showing f-Shrink achieves 0.297nm steady EPE and 86% fewer failures vs PID · CD error as low as 0.605nm, meeting 3nm process requirements.
Fields of Study & Subjects
Advancements in Photolithography Techniques
Advanced optical system design
Advanced X-ray Imaging Techniques
Publication details
- Journal / source
- Zenodo (CERN European Organization for Nuclear Research)
- Publication date
- 26 February 2026
- Language
- EN