Adaptive 4/6 Control Authority Redistribution Model for High-Throughput Yield Stabilization in Wafer Fabrication
Abstract
This document proposes an Adaptive 4/6 Control Authority Redistribution Modeldesigned to stabilize yield under high-throughput wafer fabrication conditions.Rather than relying entirely on AI-based correction or static APC gain structures,this framework dynamically reallocates control authority between:Physical process stabilization mechanismsActive predictive correction systemsThe objective is to prevent oscillation, drift amplification, and yield instabilityduring volume scaling and surge production.
Fields of Study & Subjects
Advanced Control Systems Optimization
Fault Detection and Control Systems
Industrial Technology and Control Systems
Publication details
- Journal / source
- Zenodo (CERN European Organization for Nuclear Research)
- Publication date
- 3 March 2026
- Language
- EN