Adaptive 4/6 Control Authority Redistribution Model for High-Throughput Yield Stabilization in Wafer Fabrication

Read full text
Authors: open ai no one wants the idea
Cited by: 0

Abstract

This document proposes an Adaptive 4/6 Control Authority Redistribution Modeldesigned to stabilize yield under high-throughput wafer fabrication conditions.Rather than relying entirely on AI-based correction or static APC gain structures,this framework dynamically reallocates control authority between:Physical process stabilization mechanismsActive predictive correction systemsThe objective is to prevent oscillation, drift amplification, and yield instabilityduring volume scaling and surge production.

Fields of Study & Subjects

Advanced Control Systems Optimization Fault Detection and Control Systems Industrial Technology and Control Systems

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
3 March 2026
Language
EN