Technical notes on custom-made parylene deposition system (Rutgers University).
Abstract
These technical notes describe in detail the parylene deposition process using a small-scale, custom-designed parylene deposition system built at Rurgers University. The notes also provide a few useful links to the parylene properties and original research papers on parylene deposition and its technological applications.
Fields of Study & Subjects
Advanced Materials and Semiconductor Technologies
Semiconductor materials and devices
Metal and Thin Film Mechanics
Publication details
- Journal / source
- Zenodo (CERN European Organization for Nuclear Research)
- Publication date
- 7 March 2026
- Language
- EN