Phase Stability Analysis of Semiconductor Plasma Etching RF Frequencies: The Golden Ratio as Optimal Frequency Criterion

Zenodo (CERN European Organization for Nuclear Research) 2026 Preprint Open access

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Authors: Nicolae Pascal
DOI: 10.5281/zenodo.19050967
Cited by: 0

Abstract

"Part of a series on phase stability in coupled plasma oscillator systems. See also: Phase Stability Analysis of Hall Thruster Plasma Oscillations (Zenodo, 2026)."

Fields of Study & Subjects

Low-Pressure Plasma Processing and Diagnostics Vacuum and Plasma Arcs Dust and Plasma Wave Phenomena

Publication details

Journal / source
Zenodo (CERN European Organization for Nuclear Research)
Publication date
16 March 2026
Language
EN
Document type
Preprint