Gigahertz Acoustic Wave Devices Using AlN Piezoelectric Thin Films

NTT technical review 2026

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Authors: Hajime Okamoto, Megumi Kurosu, Daiki Hatanaka, Motoki Asano, Yoshitaka Taniyasu, Hiroshi Yamaguchi

DOI: 10.53829/ntr202606fa5

Cited by: 1

References: 3

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Ultrasonics and Acoustic Wave Propagation Acoustic Wave Phenomena Research

References 3