Continuous superposition of high power pulses and radio frequency power on a single magnetron target

Repository KITopen (Karlsruhe Institute of Technology) 2026 Open access

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Authors: J. Müller, J. Swoboda, Frank Burmeister, A. Fromm, M. Wirth, A. Killinger, Sven Ulrich

DOI: 10.5445/ir/1000189421

Cited by: 0

Fields of Study & Subjects

Metal and Thin Film Mechanics Plasma Diagnostics and Applications Pulsed Power Technology Applications