Data of "Development and Characterization of a Chemically Amplified Positive-Tone Hybrid Resist for Thick-Film Microfabrication"

Recherche Data Gouv France 2026 Dataset Open access

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Authors: Pascal Etienne
DOI: 10.57745/bpuvok
Cited by: 0

Abstract

These data meet all results and figures contained in the paper "Development and Characterization of a Chemically Amplified Positive-Tone Hybrid Resist for Thick-Film Microfabrication"

Fields of Study & Subjects

Advancements in Photolithography Techniques Electrical and Thermal Properties of Materials Nanofabrication and Lithography Techniques

Publication details

Journal / source
Recherche Data Gouv France
Publication date
1 January 2026
Language
EN
Document type
Dataset