Multi-Energy High Dynamic Range Synchrotron X-ray Computed Tomography applied to LTCC samples

Synchrotron X-ray computed tomography (SXCT) is regularly used in materials science to correlate structural properties with macroscopic properties and to optimize manufacturing processes. The X-ray beam energy must be adapted to the sample properties, such as size and density. If both strongly and weakly absorbing materials are present, the contrast to the weakly absorbing materials is lost, resulting in image artifacts and a poor signal-to-noise ratio (SNR). One example is a low-temperature co-fired ceramics (LTCC), in which metal connections are embedded in a ceramic matrix and form 3-dimensional conducting structures. This article describes a method of combining SXCT scans acquired at different beam energies, significantly reducing metal artifacts, and improving image quality. We show how to solve the difficult task of merging the scans at low and high beam energy. Our proposed merging approach achieves up to 35% improvement in SNR within ceramic regions adjacent to metallic conductors. In this way, previously inaccessible regions within the ceramic structure close to the metallic conductors are made accessible. The paper further discusses methodological requirements, limitations, and potential extensions of the presented multienergy SXCT merging technique.