Ellipsometer

2DCC - DMR-FIRST 2026 Open access

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Authors: Gaertner Scientific
DOI: 10.60551/0ngn-6f53
Cited by: 0

Abstract

Automated ellipsometer for the measurement and mapping of film thicknesses and refractive indices on substrates up to 8? wide

Fields of Study & Subjects

Optical Polarization and Ellipsometry Surface Roughness and Optical Measurements Optical measurement and interference techniques

Publication details

Journal / source
2DCC - DMR-FIRST
Publication date
30 January 2026