LEXT

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Authors: Evident Scientific
Cited by: 0

Abstract

The Olympus OLS 5000 LEXT is a surface metrology 3D microscope. The LEXT creates 3D scans of sample surfaces with height resolution down to 5 nanometers with NIST-traceable accuracy. 3D scans take just seconds and the software suite allows full characterization of samples including roughness, curvature, step heights, line profiles, and other material parameters. The LEXT can accommodate almost any sample up to 4”x4”x4” without any special preparation required or the restrictions of SEMs or AFMs.

Fields of Study & Subjects

Surface Roughness and Optical Measurements Optical measurement and interference techniques Advanced Measurement and Metrology Techniques

Publication details

Journal / source
2DCC - DMR-FIRST
Publication date
30 January 2026