LEXT
Abstract
The Olympus OLS 5000 LEXT is a surface metrology 3D microscope. The LEXT creates 3D scans of sample surfaces with height resolution down to 5 nanometers with NIST-traceable accuracy. 3D scans take just seconds and the software suite allows full characterization of samples including roughness, curvature, step heights, line profiles, and other material parameters. The LEXT can accommodate almost any sample up to 4”x4”x4” without any special preparation required or the restrictions of SEMs or AFMs.
Fields of Study & Subjects
Surface Roughness and Optical Measurements
Optical measurement and interference techniques
Advanced Measurement and Metrology Techniques
Publication details
- Journal / source
- 2DCC - DMR-FIRST
- Publication date
- 30 January 2026