2026 Canister paper data for release
Abstract
These are the raw data files for the canister paper that we are planning to submit soon for publication. The data themselves consist of raw AFM, XPS, Ellipsometry data, and log files from the operation of the ALD system.All data are presented as tabular .csv files and can be viewed with any spreadsheet or text editor.
Publication details
- Journal / source
- UR Research (University of Rochester)
- Publication date
- 1 January 2026
- Document type
- Dataset