Visualization 3

Figshare 2026 Open access

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Authors: Soo Hoon Chew
DOI: 10.6084/m9.figshare.30265909
Cited by: 0

Abstract

Supplemental video showing the raw RPI reconstructions from all 200 individual diffraction images within a ptychographic scan for the EUV diffuser mask used in this work, with the probe beam distribution highlighted in yellow.

Fields of Study & Subjects

Advanced X-ray Imaging Techniques Advancements in Photolithography Techniques X-ray Diffraction in Crystallography

Publication details

Journal / source
Figshare
Publication date
1 January 2026
Language
EN