Enhancing Film Bulk Acoustic Resonators Performance by Optimizing AlN Seed Layer Crystallinity and Polarity Alignment

Figshare 2026 Dataset Open access

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Authors: Tingting Yang, Qinwen Xu, Yaxin Wang, Yao Cai, Haiyang Li, Yupeng Zheng, Min Zeng, Jingyi Qu, Lei Li, Chao Gao, Xiyu Gu, Binghui Lin
+4 more Shishang Guo, Cheng Lei, Sheng Liu, Chengliang Sun
DOI: 10.6084/m9.figshare.30876629
Cited by: 0

Abstract

This dataset contains the minimum source data supporting the findings of this study, including results from material parameter calculations, thin-film characterization, and device performance measurements.

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Ultrasonics and Acoustic Wave Propagation Advanced MEMS and NEMS Technologies

Publication details

Journal / source
Figshare
Publication date
3 March 2026
Language
EN
Document type
Dataset