Supplementary document for Rapid fabrication of customizable periodic structures using DMD-Dammann interference lithography - 7747167.pdf

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Authors: Ziyi Zhou, Xian-Zi Dong, xuan-ming duan, Meiling Zheng
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Fields of Study & Subjects

Advancements in Photolithography Techniques Advanced Optical Imaging Technologies Advanced optical system design

Publication details

Journal / source
Figshare
Publication date
1 January 2026