Data_Ultra-low-dose ultra-high-resolution EUV ptychographic imaging

Figshare 2026 Open access

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Authors: Li Liu, Honggang Gu, Shiyuan liu
DOI: 10.6084/m9.figshare.31062556
Cited by: 0

Abstract

Data_Ultra-low-dose ultra-high-resolution EUV ptychographic imaging

Fields of Study & Subjects

Advanced X-ray Imaging Techniques Advancements in Photolithography Techniques Advanced Electron Microscopy Techniques and Applications

Publication details

Journal / source
Figshare
Publication date
1 January 2026