Supplement Number 1
Abstract
Materials and methods and additional figures including device fabrication process, XRD and XPS patterns, AFM images, TEM images, quasi-static capacitance-voltage (QSCV) measurement methods and results, time-dependent dielectric breakdown behavior of the devices
Fields of Study & Subjects
Semiconductor materials and devices
Ferroelectric and Negative Capacitance Devices
Dielectric properties of ceramics
Publication details
- Journal / source
- AIP Publishing
- Publication date
- 1 January 2026
- Document type
- Dataset