Supplement Number 1

AIP Publishing 2026 Open access

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Authors: Yuma Kato, junji kataoka, Ryo Saito, Daiki Iino, Kazuaki Kurihara, Tetsuya Sato, Hiroyuki Fukumizu
DOI: 10.60893/figshare.apl.31081645
Cited by: 0

Abstract

Temperature dependence of the peak position of SiFx peak.

Fields of Study & Subjects

X-ray Spectroscopy and Fluorescence Analysis Electron and X-Ray Spectroscopy Techniques Semiconductor materials and devices

Publication details

Journal / source
AIP Publishing
Publication date
1 January 2026
Language
EN