Supplementary Information

AIP Publishing 2026 Open access

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Authors: Jack Kramer, Joshua Campbell, Tzu-Hsuan Hsu, Ian Anderson, Ruochen Lu
DOI: 10.60893/figshare.apl.31361608
Cited by: 0

Abstract

See the supplementary material for (i) comparison of am- bient, vacuum, and cryogenic measurements, (ii) fabrication flow and details, (iii) a detailed discussion of quality factor extraction and fitting.

Fields of Study & Subjects

Mechanical and Optical Resonators Acoustic Wave Resonator Technologies Advanced MEMS and NEMS Technologies

Publication details

Journal / source
AIP Publishing
Publication date
11 March 2026
Language
EN