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AIP Publishing 2026 Open access

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Authors: Jules Duraz, H. Souissi, M. Gromovyi, David Troadec, Téo Baptiste, Géraldine Hallais, Nathaniel Findling, Phuong Vuong, Rajat Gujrati, Thi Kim Tuyet Tran, Jean‐Paul Salvestrini, Maria Tchernycheva
+4 more Suresh Sundaram, A. Ougazzaden, Gilles Patriarche, S. Bouchoule
DOI: 10.60893/figshare.jap.30874856
Cited by: 0

Abstract

Detailed information regarding the epitaxial structure, processing steps, electrical characterization, FIB etching and TEM-EDX analysis.

Fields of Study & Subjects

Advanced Electron Microscopy Techniques and Applications Integrated Circuits and Semiconductor Failure Analysis Nanofabrication and Lithography Techniques

Publication details

Journal / source
AIP Publishing
Publication date
8 January 2026