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AIP Publishing 2026 Open access

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Authors: Yuichi Oshima, Takayoshi Oshima, Shiyu Xiao, Kazuto Murakami, Katsuhiro Imai, Takahiro Tomita
DOI: 10.60893/figshare.jap.31171276
Cited by: 0

Abstract

Wafer curvature, XRC data, and optical microscopy image showing inhomogeneous etch pit distribution

Fields of Study & Subjects

Silicon and Solar Cell Technologies Semiconductor materials and devices Silicon Carbide Semiconductor Technologies

Publication details

Journal / source
AIP Publishing
Publication date
1 January 2026
Language
EN